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Customer Integration Center
Semiconductor manufacturing requires the integration of a number of different process steps, including circuit patterning, deposition, cleaning, etching, and chemical mechanical planarization. The complexity of this integration task is increasing due to shrinking feature sizes, new materials such as copper and low-k dielectrics, and new product applications. Recognizing this trend, Novellus has established a 30,000 square foot Customer Integration Center, or CIC, at the company’s main campus in San Jose, CA. The CIC resource includes a 5,000 sq. foot Class 1 cleanroom and a 15,000 square foot Class 100 cleanroom that run 24 hours a day, 5 days a week. The Center offers a complete set of 300 mm process equipment, including the following:
State-of-the-art 193 nm lithography (ASML XT 1250 scanner, provided via Cypress Semiconductor)
Novellus VECTOR® for deposition of dielectric barrier films and intermetal low-k dielectric films
Dielectric etch/strip via Lam Research Flex® and Novellus GAMMA® 2130
Novellus INOVA® xT for Copper barrier/seed deposition
Novellus SABRE® NExT™ for copper Electrofill™
Novellus XCEDA™ for chemical mechanical planarization
The center also provides a variety of metrology and inspection resources to monitor the accuracy of the manufacturing process.
Novellus uses the CIC resource to provide customers with unit process integration proofs, and for customer demonstrations. Customers in turn use the CIC to develop customized unit process integration solutions for their own manufacturing process flows, reducing their development time and risk, and accelerating yield ramp.
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